Deposition of Ti–Al–N coatings by thermal CVD

Published 2008 View Full Article

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Title
Deposition of Ti–Al–N coatings by thermal CVD
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
Volume 26, Issue 6, Pages 563-568
Publisher
Elsevier BV
Online
2008-01-29
DOI
10.1016/j.ijrmhm.2008.01.003

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