Effects of Annealing Temperature on Parylene-C Films Formed by Chemical Vapor Condensation Method

Published 2015 View Full Article

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Title
Effects of Annealing Temperature on Parylene-C Films Formed by Chemical Vapor Condensation Method
Authors
Keywords
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Journal
MOLECULAR CRYSTALS AND LIQUID CRYSTALS
Volume 618, Issue 1, Pages 139-145
Publisher
Informa UK Limited
Online
2015-10-08
DOI
10.1080/15421406.2015.1076330
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