4.0 Article

AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides

Journal

INTERNATIONAL JOURNAL OF NANOTECHNOLOGY
Volume 6, Issue 12, Pages 1067-1085

Publisher

INDERSCIENCE ENTERPRISES LTD
DOI: 10.1504/IJNT.2009.028464

Keywords

AFM; atomic force microscopy; nanolithography; nanostructure; nanodevice; perovskite oxide

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Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films arc very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.

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