PREPARATION OF N-TYPE HIGHER MANGANESE SILICIDE FILMS BY MAGNETRON SPUTTERING

Title
PREPARATION OF N-TYPE HIGHER MANGANESE SILICIDE FILMS BY MAGNETRON SPUTTERING
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF MODERN PHYSICS B
Volume 23, Issue 16, Pages 3331-3348
Publisher
World Scientific Pub Co Pte Lt
Online
2009-07-08
DOI
10.1142/s0217979209052881

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