Article
Engineering, Electrical & Electronic
Yuan Qian, Wei Yang, Chaoxu Chen, Xiaoluo Yu
Summary: In this paper, the authors propose a new polishing method using fixed abrasive polishing in an anhydrous environment. They use cerium oxide as the main component for polishing pellets and measure its particle size distribution. They also simulate the roughness of fused silica in the polishing process and calculate the material removal rate using a Monte Carlo method. The experimental data confirm the validity of the proposed model.
Article
Optics
Yuan Qian, Wei Yang, Xiaoluo Yu, Chaoxu Chen
Summary: In this study, KDP is treated using fixed polishing in an anhydrous environment, with emphasis on analyzing the temperature field and determining optimal polishing parameters. A new material removal model is introduced to increase material removal depth, while maintaining surface roughness of the workpiece.
Article
Automation & Control Systems
Xinyu Luo, Wei Yang, Yuan Qian
Summary: The research focuses on fixed abrasive polishing in anhydrous environment, specifically examining the impact of particle size on processing quality. Results show a nonlinear relationship between roughness and particle size, with SSD originating from mechanical removal by larger particles. Optimal processing conditions involve using a ceria wheel with 100 nm particle size to achieve a roughness of 1.98 nm and SSD depth of 80 nm when polishing fused silica.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2021)
Article
Optics
Chaoxu Chen, Wei Yang, Fanwei Zhu
Summary: The dry fixed abrasive process combines chemical reaction and ductile removal, offering advantages over conventional loose abrasive polishing in terms of efficiency, controllability, and waste management. However, the wear and cutting temperatures of the process need improvement.
Article
Engineering, Electrical & Electronic
Yanhua Zou, Ryunosuke Satou, Ozora Yamazaki, Huijun Xie
Summary: A new finishing process combining magnetic abrasive finishing and fixed abrasive polishing has been proposed, which can achieve high-efficiency finishing of brittle hard materials and nano-scale surfaces. The experimental results show significant improvement in surface roughness of alumina ceramic plates after 30 minutes of processing.
Article
Chemistry, Analytical
Limin Zhang, Weixing Li, Jiakang Zhou, Mingming Lu, Qiang Liu, Yongsheng Du, Yakun Yang
Summary: Compared to conventional polishing methods, magnetorheological polishing has the advantages of no subsurface damage and good polishing effect, making it suitable for processing fused silica glass surfaces. However, the existing magnetorheological polishing material removal model has low efficiency and uneven removal, which hinders deterministic processing. A material removal (MR) model for fused silica glass is established by convolving the dwell time with the material removal function. Experimental results validate the effectiveness of the model and demonstrate improved surface accuracy under optimal process parameters.
Article
Engineering, Manufacturing
Julian Long, Tomosumi Kamimura, Haruki Marui, Yuya Tsunezuka, Akito Uemura, Hitomi Yamaguchi
Summary: Commercial processing of fused silica components can lead to contamination and damage, affecting their performance in a lasing system. This paper proposes using iron particles as a tool replacement for traditional polishing cloth to remove contaminants through magnetic field-assisted finishing (MAF). Experimental results demonstrate a significant improvement in component performance using the iron particle tool.
CIRP JOURNAL OF MANUFACTURING SCIENCE AND TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
Changhong Wang, Youhuan Ning, Wenyue Ning, Guoxing Yi, Yan Huo
Summary: This paper proposes a cyclic chemical etching method to improve the surface morphology of hemispherical resonators, significantly improving the Q factor. The developed loss model can screen hemispherical resonators with different performances according to the change of the Q factor during the etching process, which is essential for bulk fabricating high-quality factor hemispherical resonators.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Engineering, Chemical
Jiangqin Ge, Chao Li, Zhengyong Gao, Yile Ren, Xinsheng Xu, Chen Li, Yi Xie
Summary: The abrasive flow polishing method using ultrasonic vibration can enhance turbulence kinetic energy and particle dynamic pressure, improving polishing efficiency and quality. Comparative polishing experiments on K9 glass show that this method can generate highly smooth surfaces and has higher efficiency compared to the traditional SAF method.
Article
Engineering, Mechanical
Seungchul Hong, Deoksu Han, Keon-Soo Jang
Summary: The study focused on improving the planarization performance of dielectric layers by adjusting the zeta potential of particles and using surfactants, achieving a balance between performance and wafer defect density. High-quality wafer surfaces with rare defects, low roughness, and no contamination were achieved by tailoring the surface potential of colloidal silica nanoparticles and reducing defect concentration using fluorinated surfactant-induced intermolecular repulsion.
Article
Chemistry, Analytical
Pengfei Chen, Yuewu Gao, Yugang Zhao, Guoyong Zhao, Guixiang Zhang, Haiyun Zhang, Zhuang Song
Summary: This paper discusses the application of bonded magnetic abrasive powders (MAPs) in the magnetic abrasive finishing (MAF) process. By using a double-stage atomization technique, MAPs with CBN as the abrasive phase were successfully manufactured to improve the finishing performance of super-hard materials. Experimental results showed that the strong cutting ability of atomized CBN MAPs significantly improved the surface roughness of cemented carbide parts at the optimal parameters.
Article
Engineering, Chemical
Kuan-Yu Chen, Tse-Yi Tu, Yi-Hua Fan, A-Cheng Wang, Pei-Keng Fu
Summary: A rotating cylinder-based magnetic finishing setup was developed to allow gel abrasive and workpieces to tumble and rotate together during the polishing process, resulting in improved polishing effects. Experimental results showed that using bidirectional trapezoidal wave drive for the rotating cylinder achieved better average surface roughness and removed material weight results compared to the other two operating modes.
Article
Engineering, Mechanical
Jiangqin Ge, Yile Ren, Chen Li, Zhian Li, Sunting Yan, Ping Tang, Xinsheng Xu, Qiang Wang
Summary: To improve the efficiency of glass-based micro-channel polishing, an ultrasonic coupled abrasive jet polishing (UC-AJP) approach was proposed and a fluid mechanic model was established to reveal the ultrasonic enhancement law and optimal design parameters. The results showed that ultrasonic vibration significantly improved turbulent kinetic energy and impact erosion, leading to better jet stability and polishing efficiency. High-speed photography and polishing experiments confirmed that UC-AJP produced smoother surfaces and higher polishing efficiency compared to abrasive jet polishing. The optimal amplitude range in the UC-AJP process maximized the micro-channel polishing efficiency, attributed to the synergistic effect of pulse and cavitation in the pulsed abrasive jet formation.
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
(2023)
Article
Automation & Control Systems
Chengyu Xu, Wanyi Zhang, Yun Zhang, Yongwei Zhu
Summary: Maintaining the stability of material removal function is crucial for deterministic material removal processing. This paper studied the stability of material removal function for polishing TC4 titanium alloy using a fixed abrasive tool. The authors introduced the concept of curve similarity and proposed relative peak variation and average profile variation as measures to quantify the change of material removal profile over time. Experimental results showed that the simulation material removal profile closely matched the experiment results, and the hardness of the elastic layer of the fixed abrasive tool affected the width and maximum removal depth of the material removal profile.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Chemistry, Physical
Qing Mu, Xing Gao, Ying Yan, Ping Zhou
Summary: This study analyzed the evolution mechanism and influencing factors of ring structures during polishing process using both experiments and molecular dynamics simulations, and obtained an evolution-free surface. The results showed that the evolution from large rings to small rings was driven by the coupling action of load and hydroxylation. Increasing load facilitated the evolution and increased the critical evolution depth, while hydroxylation inhibited the evolution without altering the critical evolution depth.
APPLIED SURFACE SCIENCE
(2024)