Experimental dynamics characterization and monitoring of MRR in oxide chemical mechanical planarization (CMP) process

Published 2008 View Full Article

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Title
Experimental dynamics characterization and monitoring of MRR in oxide chemical mechanical planarization (CMP) process
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume 48, Issue 12-13, Pages 1375-1386
Publisher
Elsevier BV
Online
2008-06-02
DOI
10.1016/j.ijmachtools.2008.05.006

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