Focused Ne+ Ion Beams for Final Polishing of TEM Lamella Prepared Through Ga-FIB Systems

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Title
Focused Ne+ Ion Beams for Final Polishing of TEM Lamella Prepared Through Ga-FIB Systems
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 21, Issue S3, Pages 1409-1410
Publisher
Cambridge University Press (CUP)
Online
2016-12-08
DOI
10.1017/s1431927615007825
References
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