Single-crystal atomic layer deposited Y2O3 on GaAs(001) – growth, structural, and electrical characterization

Published 2015 View Full Article

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Title
Single-crystal atomic layer deposited Y2O3 on GaAs(001) – growth, structural, and electrical characterization
Authors
Keywords
Rare earth oxide, Single crystal, High k, III–V materails, ALD, GaAs(0, 0, 1)
Journal
MICROELECTRONIC ENGINEERING
Volume 147, Issue -, Pages 310-313
Publisher
Elsevier BV
Online
2015-04-16
DOI
10.1016/j.mee.2015.04.061

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