Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide

Published 2015 View Full Article

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Title
Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide
Authors
Keywords
Vanadium dioxide, Metal–insulator-transition, Sputtering, Abrupt switching
Journal
MICROELECTRONIC ENGINEERING
Volume 145, Issue -, Pages 117-119
Publisher
Elsevier BV
Online
2015-04-06
DOI
10.1016/j.mee.2015.03.055

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