Sub-100μs nanoimprint lithography at wafer scale

Published 2015 View Full Article

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Title
Sub-100μs nanoimprint lithography at wafer scale
Authors
Keywords
Ultrafast, Nanoimprint lithography, High throughput, High temperature polymer processing
Journal
MICROELECTRONIC ENGINEERING
Volume 141, Issue -, Pages 21-26
Publisher
Elsevier BV
Online
2015-01-13
DOI
10.1016/j.mee.2015.01.002

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