Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes

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Title
Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes
Authors
Keywords
Neural probes, Implant, Microelectrodes, Glassy carbon, MEMS, Impedance matching
Journal
MICROELECTRONIC ENGINEERING
Volume 133, Issue -, Pages 36-44
Publisher
Elsevier BV
Online
2014-11-23
DOI
10.1016/j.mee.2014.11.013

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