Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

Published 2015 View Full Article

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Title
Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 140, Issue -, Pages 60-66
Publisher
Elsevier BV
Online
2015-06-13
DOI
10.1016/j.mee.2015.06.004

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