Large enhancement of ultra-violet photoresponse of silicon-nanoparticle-embedded porous silicon thin films by rapid-thermal-oxidation treatment

Published 2015 View Full Article

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Title
Large enhancement of ultra-violet photoresponse of silicon-nanoparticle-embedded porous silicon thin films by rapid-thermal-oxidation treatment
Authors
Keywords
Ultra-violet, Photoresponse, Porous silicon, Rapid thermal oxidation, Photodetector
Journal
MICROELECTRONIC ENGINEERING
Volume 148, Issue -, Pages 70-73
Publisher
Elsevier BV
Online
2015-08-22
DOI
10.1016/j.mee.2015.08.011

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