Fabrication and characterisation of field-effect transistor-type pressure sensor with metal–oxide–semiconductor/microelectromechanical systems processes

Title
Fabrication and characterisation of field-effect transistor-type pressure sensor with metal–oxide–semiconductor/microelectromechanical systems processes
Authors
Keywords
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Journal
Micro & Nano Letters
Volume 10, Issue 10, Pages 483-486
Publisher
Institution of Engineering and Technology (IET)
Online
2015-10-28
DOI
10.1049/mnl.2015.0166

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