An experimental study of ultrasonic vibration-assisted grinding of polysilicon using two-dimensional vertical workpiece vibration

Published 2010 View Full Article

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Title
An experimental study of ultrasonic vibration-assisted grinding of polysilicon using two-dimensional vertical workpiece vibration
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 54, Issue 9-12, Pages 941-947
Publisher
Springer Nature
Online
2010-11-03
DOI
10.1007/s00170-010-2991-x
References
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