A thick SU-8 mask for microabrasive jet machining on glass

Published 2008 View Full Article

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Title
A thick SU-8 mask for microabrasive jet machining on glass
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 41, Issue 7-8, Pages 734-740
Publisher
Springer Nature
Online
2008-06-10
DOI
10.1007/s00170-008-1520-7

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