Top-Down Fabrication of Ordered Mesoscopic PZT Dot Arrays by Natural Lithography

Published 2011 View Full Article

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Title
Top-Down Fabrication of Ordered Mesoscopic PZT Dot Arrays by Natural Lithography
Authors
Keywords
-
Journal
INTEGRATED FERROELECTRICS
Volume 123, Issue 1, Pages 75-80
Publisher
Informa UK Limited
Online
2011-06-29
DOI
10.1080/10584587.2011.570639
References
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