Journal
INORGANICA CHIMICA ACTA
Volume 380, Issue -, Pages 161-166Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.ica.2011.10.036
Keywords
Fe(hfa)(2)center dot TMEDA; CVD; Precursors; Fe2O3
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Funding
- European Community [FP7/2007-2013, ENHANCE-238409]
- PRIN-COFIN
- Padova University
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The preparation of the second generation iron(II) complex Fe(hfa)(2)center dot TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate, TMEDA = N,N,N',N'-tetramethylethylenediamine) is performed by reacting iron(II) chloride with Hhfa and TMEDA in two subsequent steps. Density functional theory data show that the compound possesses a distorted octahedral geometry, with the two beta-diketonate ligands in a cis configuration. The complex mass transport properties and fragmentation pattern are investigated by thermal analyses and electron impact mass spectrometry, respectively. In addition, its experimental and simulated IR spectra are presented. For the first time, Fe(hfa)(2)center dot TMEDA was successfully applied in the chemical vapor deposition (CVD) of iron oxide on Si(100). Structural, compositional and morphological analyses evidence the possibility of obtaining pure, single-phase and homogeneous beta-Fe2O3 films. (C) 2011 Elsevier B. V. All rights reserved.
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