Mechanical properties and density of BCxNy films grown by low-pressure chemical vapor deposition from triethylamine borane

Title
Mechanical properties and density of BCxNy films grown by low-pressure chemical vapor deposition from triethylamine borane
Authors
Keywords
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Journal
INORGANIC MATERIALS
Volume 47, Issue 3, Pages 262-266
Publisher
Pleiades Publishing Ltd
Online
2011-03-09
DOI
10.1134/s0020168511030204

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