Optimization of a Chemical Vapor Deposition Process Using Sequential Experimental Design

Published 2010 View Full Article

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Title
Optimization of a Chemical Vapor Deposition Process Using Sequential Experimental Design
Authors
Keywords
-
Journal
INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH
Volume 49, Issue 12, Pages 5694-5701
Publisher
American Chemical Society (ACS)
Online
2010-05-19
DOI
10.1021/ie901055e

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