Disturbance-Observer-Based Sliding-Mode Control for a 3-DOF Nanopositioning Stage

Published 2013 View Full Article

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Title
Disturbance-Observer-Based Sliding-Mode Control for a 3-DOF Nanopositioning Stage
Authors
Keywords
-
Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 19, Issue 3, Pages 924-931
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-05-31
DOI
10.1109/tmech.2013.2262802

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