Motion Profile Design to Reduce Residual Vibration of High-Speed Positioning Stages

Title
Motion Profile Design to Reduce Residual Vibration of High-Speed Positioning Stages
Authors
Keywords
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Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 14, Issue 2, Pages 264-269
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-02-27
DOI
10.1109/tmech.2008.2012160

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