Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 14, Issue 4, Pages 405-413Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2009.2023987
Keywords
Atomic force microscopy; control systems; nanotechnology; piezoelectric transducers; scanning probe microscope (SPM); scanning tunneling microscope (STM)
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Funding
- National Science Foundation (NSF) [CMS 0301787]
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Rather than using external sensors, images of standard calibration samples can be used to model and correct positioning errors caused by dynamics effects in scanning probe microscopes (SPMs). The main contribution of this study is the development of conditions, on the calibration sample and the scan trajectory, that allow for the image-based identification of SPM-nanopositioner dynamics. The choice of and tradeoff between calibration sample and scan trajectory properties are discussed in the context of a scanning tunneling microscope (STM) example.
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