Property Analysis of the Rough Slider Bearings in Micromotors for MEMS Applications

Published 2009 View Full Article

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Title
Property Analysis of the Rough Slider Bearings in Micromotors for MEMS Applications
Authors
Keywords
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Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 14, Issue 4, Pages 465-473
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-06-17
DOI
10.1109/tmech.2009.2023442
References
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