Using the acetylacetonates of zinc and aluminium for the Metalorganic Chemical Vapour Deposition of aluminium doped zinc oxide films

Published 2015 View Full Article

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Title
Using the acetylacetonates of zinc and aluminium for the Metalorganic Chemical Vapour Deposition of aluminium doped zinc oxide films
Authors
Keywords
Z, inc oxide, Metalorganic Chemcical Vapour Deposition, Zinc acetylacetonate, Aluminium acetylacetonate, Transparent conducting oxide, TCO
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 39, Issue -, Pages 467-475
Publisher
Elsevier BV
Online
2015-06-12
DOI
10.1016/j.mssp.2015.05.053

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