Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O3 thin films on si wafer prepared by fast cooling immediately after sputter deposition

Published 2014 View Full Article

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Title
Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O3 thin films on si wafer prepared by fast cooling immediately after sputter deposition
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 61, Issue 9, Pages 1552-1558
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-08-30
DOI
10.1109/tuffc.2014.3069

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