Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 60, Issue 4, Pages 854-857Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2013.2635
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Funding
- National Natural Science Foundation of China [51002055]
- National Key Technology R&D Program in the 12th Five-year Plan of China [2012BAI13B02]
- Electronic Materials Research Laboratory, Key Laboratory of The Ministry of Education of China
- National Institutes of Health [P41-EB2182]
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The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-mu m hydrothermal PZT thick film with an area of 1 x 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.
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