Integrated ferroelectric stacked mim capacitors with 100 nF/mm2and 90 V breakdown as replacement for discretes

Published 2009 View Full Article

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Title
Integrated ferroelectric stacked mim capacitors with 100 nF/mm2and 90 V breakdown as replacement for discretes
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 56, Issue 3, Pages 425-428
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-04-22
DOI
10.1109/tuffc.2009.1060

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