Fault Detection Using Principal Components-Based Gaussian Mixture Model for Semiconductor Manufacturing Processes

Published 2011 View Full Article

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Title
Fault Detection Using Principal Components-Based Gaussian Mixture Model for Semiconductor Manufacturing Processes
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 24, Issue 3, Pages 432-444
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-14
DOI
10.1109/tsm.2011.2154850

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