Yield Management Enhanced Advanced Process Control System (YMeAPC)—Part I: Description and Case Study of Feedback for Optimized Multiprocess Control

Published 2010 View Full Article

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Title
Yield Management Enhanced Advanced Process Control System (YMeAPC)—Part I: Description and Case Study of Feedback for Optimized Multiprocess Control
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 23, Issue 2, Pages 221-235
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-01-30
DOI
10.1109/tsm.2010.2041294

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