Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches

Published 2008 View Full Article

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Title
Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 21, Issue 2, Pages 148-153
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-05-06
DOI
10.1109/tsm.2008.2000285

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