Novel Carbon-Cage-Based Ultralow-$k$ Materials: Modeling and First Experiments

Published 2008 View Full Article

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Title
Novel Carbon-Cage-Based Ultralow-$k$ Materials: Modeling and First Experiments
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 21, Issue 4, Pages 646-660
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-11-06
DOI
10.1109/tsm.2008.2005396
References
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