DLC Coating by HiPIMS: The Influence of Substrate Bias Voltage

Title
DLC Coating by HiPIMS: The Influence of Substrate Bias Voltage
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 41, Issue 8, Pages 1819-1829
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-06-07
DOI
10.1109/tps.2013.2256800

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