Low-Temperature Atmospheric-Pressure-Plasma Jet for Thin-Film Deposition

Title
Low-Temperature Atmospheric-Pressure-Plasma Jet for Thin-Film Deposition
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 37, Issue 7, Pages 1127-1128
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-01-31
DOI
10.1109/tps.2008.2011636

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