Influence of Nonthermal Plasma Reactor Type on $ \hbox{CF}_{4}$ and $\hbox{SF}_{6}$ Abatements

Published 2008 View Full Article

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Title
Influence of Nonthermal Plasma Reactor Type on $ \hbox{CF}_{4}$ and $\hbox{SF}_{6}$ Abatements
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 2, Pages 509-515
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-04-11
DOI
10.1109/tps.2008.918675

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