Interaction of Oxygen Plasma With Aluminium Substrates

Title
Interaction of Oxygen Plasma With Aluminium Substrates
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 4, Pages 868-869
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-08-05
DOI
10.1109/tps.2008.925383

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