Cofabrication of Vacuum Field Emission Transistor (VFET) and MOSFET

Published 2014 View Full Article

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Title
Cofabrication of Vacuum Field Emission Transistor (VFET) and MOSFET
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 13, Issue 3, Pages 464-468
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-03-12
DOI
10.1109/tnano.2014.2310774

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