Impact of LER and Random Dopant Fluctuations on FinFET Matching Performance

Published 2008 View Full Article

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Title
Impact of LER and Random Dopant Fluctuations on FinFET Matching Performance
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 7, Issue 3, Pages 291-298
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-05-22
DOI
10.1109/tnano.2008.917838
References
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