Operation of Lorentz-Force MEMS Magnetometers With a Frequency Offset Between Driving Current and Mechanical Resonance

$Z$-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process

(2012) Giacomo Langfelder et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

2-Axis Magnetometers Based on Full Wheatstone Bridges Incorporating Magnetic Tunnel Junctions Connected in Series

(2012) Ricardo Ferreira et al.   IEEE TRANSACTIONS ON MAGNETICS

Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications

(2012) Mo Li et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Towards Miniaturization of a MEMS-Based Wearable Motion Capture System

(2011) Carmen M. N. Brigante et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Readout of MEMS capacitive sensors beyond the condition of pull-in instability

(2011) G. Langfelder et al.   SENSORS AND ACTUATORS A-PHYSICAL

A Characterization of the Performance of a MEMS Gyroscope in Acoustically Harsh Environments

(2010) Robert Neal Dean et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution

(2010) A.L. Herrera-May et al.   SENSORS AND ACTUATORS A-PHYSICAL

A Micropower $\Delta\Sigma$-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

(2009) Matti Paavola et al.   IEEE JOURNAL OF SOLID-STATE CIRCUITS

Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications

(2009) Cenk Acar et al.   IEEE SENSORS JOURNAL

On a deterministic approach for the evaluation of gas damping in inertial MEMS in the free-molecule regime

(2008) A. Frangi et al.   SENSORS AND ACTUATORS A-PHYSICAL

A 3D micromechanical compass

(2007) Jukka Kyynäräinen et al.   SENSORS AND ACTUATORS A-PHYSICAL