Improved High Frequency Response and Quality Factor of On-Chip Ferromagnetic Thin Film Inductors by Laminating and Patterning Co-Zr-Ta-B Films

Title
Improved High Frequency Response and Quality Factor of On-Chip Ferromagnetic Thin Film Inductors by Laminating and Patterning Co-Zr-Ta-B Films
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON MAGNETICS
Volume 49, Issue 7, Pages 4176-4179
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-07-26
DOI
10.1109/tmag.2013.2249500

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