Journal
IEEE TRANSACTIONS ON MAGNETICS
Volume 45, Issue 10, Pages 4770-4772Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2009.2023618
Keywords
Microdevice fabrication; microinductors; polymer-metal nanocomposite; RF applications
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Microdevices like microinductors for modern mobile communication electronics working at high frequencies and with sufficient quality factors are of great interest due to their potential benefits in terms of miniaturization and integration into the overall fabrication process. Toroidal microinductors with a magnetic core with high cut-off frequencies and permeabilities consisting of nanostructured composite materials of a magnetic alloy and a polymer fulfill these demands. This paper presents the fabrication of the microinductors by use of thin film deposition techniques, photolithography, electroplating, and etching processes and the integration of sputtered magnetic cores consisting of material with high cut-off frequencies.
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