Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements

Published 2012 View Full Article

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Title
Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume 61, Issue 5, Pages 1315-1322
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-02-11
DOI
10.1109/tim.2011.2178678
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