Cascaded “Triple-Bent-Beam” MEMS Sensor for Contactless Temperature Measurements in Nonaccessible Environments

Published 2011 View Full Article

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Journal

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

Volume 60, Issue 4, Pages 1348-1357

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2011-01-22

DOI

10.1109/tim.2010.2101310

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