Feasibility Study of ${\rm SrRuO}_{3}/{\rm SrTiO}_{3}/{\rm SrRuO}_{3}$ Thin Film Capacitors in DRAM Applications

Authors

Keywords

Journal

Volume 61, Issue 6, Pages 2130-2135

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2014-04-15

DOI

10.1109/ted.2014.2314148

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