Fourier Transform Infrared Spectroscopy of Moisturized Low-$\kappa$ Dielectric Materials

Published 2011 View Full Article

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Title
Fourier Transform Infrared Spectroscopy of Moisturized Low-$\kappa$ Dielectric Materials
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 58, Issue 9, Pages 2888-2894
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-07-27
DOI
10.1109/ted.2011.2159506

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