Gate-First Integration of Tunable Work Function Metal Gates of Different Thicknesses Into High-$k$/Metal Gates CMOS FinFETs for Multi- $V_{\rm Th}$ Engineering

Title
Gate-First Integration of Tunable Work Function Metal Gates of Different Thicknesses Into High-$k$/Metal Gates CMOS FinFETs for Multi- $V_{\rm Th}$ Engineering
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 57, Issue 3, Pages 626-631
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-02-11
DOI
10.1109/ted.2009.2039097

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