Stress Liner Effects for 32-nm SOI MOSFETs With HKMG

Published 2010 View Full Article

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Title
Stress Liner Effects for 32-nm SOI MOSFETs With HKMG
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 57, Issue 7, Pages 1706-1709
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-05-28
DOI
10.1109/ted.2010.2049076

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