A Novel Trapping/Detrapping Model for Defect Profiling in High- $k$ Materials Using the Two-Pulse Capacitance–Voltage Technique

Title
A Novel Trapping/Detrapping Model for Defect Profiling in High- $k$ Materials Using the Two-Pulse Capacitance–Voltage Technique
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 57, Issue 10, Pages 2726-2735
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-08-25
DOI
10.1109/ted.2010.2063292

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