Electron Mobility and Short-Channel Device Characteristics of SOI FinFETs With Uniaxially Strained (110) Channels

Title
Electron Mobility and Short-Channel Device Characteristics of SOI FinFETs With Uniaxially Strained (110) Channels
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 56, Issue 8, Pages 1651-1658
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-07-16
DOI
10.1109/ted.2009.2024029

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