A Multiscale Assembly and Packaging System for Manufacturing of Complex Micro-Nano Devices

Published 2011 View Full Article

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Title
A Multiscale Assembly and Packaging System for Manufacturing of Complex Micro-Nano Devices
Authors
Keywords
-
Journal
IEEE Transactions on Automation Science and Engineering
Volume 9, Issue 1, Pages 160-170
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-11-18
DOI
10.1109/tase.2011.2173570

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